A mechanical analysis of a multilayered polysilicon laminated system, constructed by alternating deposition of low-pressure chemical vapor deposition (LPCVD) polysilicon at two different temperatures is presented. The different crystallization behavior at the two temperatures results in misfit strains that can be exploited to control the radius of curvature of released structures. We describe a semi-empirical method for estimating the nonuniform misfit strain distributions associated with the two temperatures, and using these to design laminated systems for prescribed curvature.